Based on the traditional polysilicon reduction furnace

a novel polysilicon reduction furnace is presented.The velocity and temperature fields are simulated by using computational fluid dynamic.The simulation result of the flow field shows that the flow pattern of the gas mixture in the novel furnace is plug flow

which is fundamentally different from that in traditional furnace.The simulation shows that the temperature field in the novel furnace can be controlled by changing the operating parameters

which solves the problem of high local temperature in traditional furnace

avoids the generation of the silicon powder and reduces the radiation power consumption.The energy consumption in the novel furnace is 8.5% lower than that in the traditional furnace.