Benzoxazine monomer with fluorinated silane-functional group was synthesized. The effect of hydrolytic immersion condition for the formation of films was tested. Furthermore
the effect of curing temperature and curing time on the surface free energy of the polybenzoxazines were investigated. The thermal stability of the polybenzoxazine at various thermal processing temperatuers (100℃-350℃)was also considered . The results indicate that the immersion solution modulated by hydrochloric acid solution (pH=2) displays the best film formation property. The lowest surface free energy of the polybenzoxazine cured at 160℃,190℃,220℃ and 240℃ are 15.6 mJ?m-2 (4 h)
15.0 mJ?m-2 (1 h)
15.3 mJ?m-2 (15 min)
15.5 mJ?m-2 (5 min) respectively
which are even lower than that of Teflon (22.0 mJ?m-2). The surface free energy of the polybenzoxazine possesses well themal stability below 200℃. The polybenzoxazine material is the most potential anti-adhesive materials applied in hot-embossing nanoimprint lithography.