As a new type of modern manufacturing technologies

micro-fabrication technology comes into being with the emergence of micro-manufacturing

which realizes the machining and assembly in micro size. The chemical etching technology is one of the major processing methods for micro-fabrication technology

which includes immersing

bubbling

spraying and so on. Among them the equipment of immersion etching is simple

easy to operate and relatively low-cost. In this study

the influence of etching time

concentration of the etching liquid composition

etching temperature and other factors on the chemical etching is mainly studied by using single factor immersion method. The results show that FeCl3 concentration

H3PO4 concentration in the etching liquid

etching temperature and others heavily affected the etching rate

etching uniformity

lateral erosion and surface roughness. It provides elementary process parameters for the micro-manufacturing.