基于真空镀膜技术的薄膜热传感器实验

罗潇; 郭航; 叶芳; 马重芳

doi:10.11949/0438-1157.20190571

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基于真空镀膜技术的薄膜热传感器实验

流体力学与传递现象 | 更新时间：2020-06-24

- 基于真空镀膜技术的薄膜热传感器实验
- Experiment of thin film thermal sensor based on vacuum coating technology
- 化工学报 2019年70卷第S2期页码：123-129
- 作者机构：
  
  北京工业大学环境与能源工程学院, 传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室，北京 100124
- 作者简介：
  
  罗潇（1991—），男，硕士研究生，s2015015128@emails.bjut.edu.cn
  郭航（1970—），男，博士，教授，hangguo@bjut.edu.cn
- 基金信息：
  
  国家自然科学基金项目(51476003)
- DOI：10.11949/0438-1157.20190571
  中图分类号： TK 311
- 收稿：2019-05-27，
  
  修回：2019-05-29，
  
  纸质出版：2019-09-05
- 稿件说明：
移动端阅览
罗潇, 郭航, 叶芳, 马重芳. 基于真空镀膜技术的薄膜热传感器实验[J]. 化工学报, 2019, 70(S2): 123-129

LUO Xiao, GUO Hang, YE Fang, MA Chongfang. Experiment of thin film thermal sensor based on vacuum coating technology[J]. CIESC Journal, 2019, 70(S2): 123-129
罗潇, 郭航, 叶芳, 马重芳. 基于真空镀膜技术的薄膜热传感器实验[J]. 化工学报, 2019, 70(S2): 123-129 DOI： 10.11949/0438-1157.20190571.

LUO Xiao, GUO Hang, YE Fang, MA Chongfang. Experiment of thin film thermal sensor based on vacuum coating technology[J]. CIESC Journal, 2019, 70(S2): 123-129 DOI： 10.11949/0438-1157.20190571.

摘要

采用真空蒸发镀膜技术设计制作了以云母为基片的薄膜热传感器，传感器包括一个用于热流测量的热电堆和一个用于温度测量的热电偶。综合测试发现：云母基片薄膜热传感器性能良好。封装后，薄膜热电偶的静态标定拟合直线相关系数均可以达到0.999。薄膜热流计的静态标定拟合直线的相关系数为0.99439，测头系数为8.78886 W/(m

∙μV)，灵敏度为0.11378 μV/(W/m

)。薄膜热电偶的动态响应时间是0.446 s且具有良好的复现性。随着加载热流的增大，薄膜热流计的动态响应时间变大，阶跃热流值为600 W/m

时响应时间为0.483 s。

Abstract

A thin film thermal sensor based on mica was fabricated by vacuum evaporation coating technology

which comprises a thermopile for heat flow measurement and a thermocouple for temperature measurement. Comprehensive test results show that mica substrate sensor perform satisfactorily. The static calibration fitting linear correlation coefficient of encapsulated film thermocouple can reach 0.999. Correlation coefficient of static calibration fitting line for film heat flow meter was 0.99439

probe coefficient was 8.78886 W/(m

∙μV)

and sensitivity of film heat flow meter was 0.11378 μV/(W/m

). Dynamic response time of the film thermocouple measured twice was 0.446 s. As the loading heat flow increased

the dynamic response time of film heat flow meter increased. Response time was 0.483 s when the step heat flow value was 600 W/m

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