The fluid flow

heat transfer and mass transfer are incorporated in a two-dimensional model of an axisymmetric reactor. The problem is solved numerically by Galerkin finite element method

using a velocity-pressure formulation for the N-S equations. The dependence of density

viscosity

thermal conductivity and diffusion coefficient on temperature are considered and the presence of free convection is simulated rather well. The distributions of velocity

temperature

TiCl4 concentration in the reactor and the deposition rate of TiN on the substrate are predicted. The computational results are in good agreement with experimental data.