A porous silicon（PS）template with porous size ofφ3μm×2μm and total volume of 0.0224 mm3 fabricated by anodizing p-Si（100）in HF bath was reported.The seed layer catalysts of Ag，Au，Pd and Pt were formed by immersing deposition on PS in the metal ion solutions.A Ni positive template with thickness of 15 μm was deposited electrolessly，and increased to 200 μm by electroplating.Then Ni positive template was peeled off from PS by ultrasonic after dipping in 10% HF solution for 10 min.Morphology study showed that the seed layers deposited preferentially on borders than in pores of PS and the PS maintained its shape，which could be used to fabricate microreactor with catalytic function.The interface between Ni template and PS presented many orbicular island grains and could be used to fabricate microheater.The results show that this process is a simple，inexpensive technology and can be used to fabricate microreactor combined with microheater.