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Anti-scaling effect comparison of high-frequency electromagnetic pulses stimulation in processing chambers with different electrodes
更新时间:2025-12-10
    • Anti-scaling effect comparison of high-frequency electromagnetic pulses stimulation in processing chambers with different electrodes

    • CIESC Journal   Issue 10, Pages: 3220-3224(2012)
    • DOI:10.3969/j.issn.0438-1157.2012.10.031    

      CLC: 703
    • Online First:05 October 2012,

      Published:05 October 2012

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  • XIONG Lan, MIAO Xuefei, WU Yimei, et al. Anti-scaling effect comparison of high-frequency electromagnetic pulses stimulation in processing chambers with different electrodes[J]. CIESC Journal, 2012, (10): 3220-3224. DOI: 10.3969/j.issn.0438-1157.2012.10.031.

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