Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor

LI Yingge; MA Lianxiang; ZHANG Na; YUAN Shikui; DU Dongxing

doi:10.11949/j.issn.0438-1157.20160555

您当前的位置：

首页 >

文章列表页 >

Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor

更新时间：2025-12-10

- Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor
- CIESC Journal Issue S1, Pages: 159-165(2016)
- 作者机构：
  
  1. 青岛科技大学自动化与电子工程学院,山东,青岛,266042
  2. 青岛科技大学机电工程学院,山东,青岛,266061
- 作者简介：
- 基金信息：
- DOI：10.11949/j.issn.0438-1157.20160555
  CLC： K311
- Online First：31 August 2016，
  
  Published：31 August 2016
- 稿件说明：
移动端阅览
LI Yingge, MA Lianxiang, ZHANG Na, et al. Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor[J]. CIESC Journal, 2016, (S1): 159-165.
DOI：

LI Yingge, MA Lianxiang, ZHANG Na, et al. Numerical analysis of temperature frequency characteristics of surface acoustic wave sensor[J]. CIESC Journal, 2016, (S1): 159-165. DOI： 10.11949/j.issn.0438-1157.20160555.

摘要

利用ANSYS软件对声表面波传感器进行温度频率特性的数值模拟研究。分析了在一定压力情况下，基于氮化铝压电薄膜铝叉指换能器的延迟型传感器结构内部的温度有限元分布情况。结果表明外界自然对流对传感器内部的温度场及应力场分布影响很小。并模拟计算出温度与输出串联谐振频率变化的关系，通过数据拟合得出，SAW传感器的输出谐振频率与环境温度变化呈良好的线性关系，因此可应用于温度的精确测试。

Abstract

Numerical simulation has been carried out concerning the temperature frequency characteristics of a surface acoustic wave (SAW) sensor with ANSYS software. The internal temperature distribution of delay line surface acoustic wave sensor with Si/AlN/Al structure was analyzed under a certain pressure. The results show the effect of natural convection on the temperature field and stress field distribution in the sensor is small. The relationship between the temperature and the output resonant frequency is also simulated. According to the data fitting

the output series resonant frequency of the SAW sensor has a good linear relationship with the environmental temperature

so it can be used in the precise measurement of the temperature.

关键词

Keywords

references

Views

236

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Numerical simulation study on particle orientation and anisotropic thermal conductivity in magnetic nanofluids

Thermoelectric transport properties of graphyne with different structures based on first principles

Study on coupling operation characteristics of Stirling engine and high temperature heat pipe

Numerical simulation of flow characteristics in a rotating membrane filter

Numerical studies on heat transfer characteristics of pile heat exchanger with double spiral pipes buried in parallel

Related Author

WU Shunjie

CAI Rongrong

Eliseev A.A.

ZHANG Lizhi

JIANG Xuhao

LIU Yuanchao

XU Yifan

LI Duan

Related Institution

School of Chemistry and Chemical Engineering, South China University of Technology

Department of Materials Science, Lomonosov Moscow State University, Leninskie Gory, 1b73

School of Mechanical Engineering, Beijing Institute of Petrochemical Technology

School of Mechanical and Power Engineering, Shanghai Jiao Tong University

School of Energy and Power Engineering, University of Shanghai for Science and Technology

⁰