Experiment on immersion chemical etching technology of fluid micro-channels

XIN Fei; LI Lei; WANG Qiuwang

doi:10.11949/j.issn.0438-1157.20150132

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Experiment on immersion chemical etching technology of fluid micro-channels

更新时间：2025-12-10

- Experiment on immersion chemical etching technology of fluid micro-channels
- CIESC Journal Issue 10, Pages: 4115-4122(2015)
- 作者机构：
  
  西安交通大学热流科学与工程教育部重点实验室,陕西,西安,710049
- 作者简介：
- 基金信息：
- DOI：10.11949/j.issn.0438-1157.20150132
  CLC： G178TQ138.1
- Online First：05 October 2015，
  
  Published：05 October 2015
- 稿件说明：
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XIN Fei, LI Lei, WANG Qiuwang. Experiment on immersion chemical etching technology of fluid micro-channels[J]. CIESC Journal, 2015, (10): 4115-4122.
DOI：

XIN Fei, LI Lei, WANG Qiuwang. Experiment on immersion chemical etching technology of fluid micro-channels[J]. CIESC Journal, 2015, (10): 4115-4122. DOI： 10.11949/j.issn.0438-1157.20150132.

摘要

微细加工技术是伴随着微制造的出现而产生的一类新型现代化制造技术

它实现了微小尺度范围内的机械加工和装配。化学蚀刻技术是微细加工技术主要的加工方法之一

包括浸泡、鼓泡、喷淋等方法

其中浸泡式蚀刻方法相对来说设备简单、操作方便、节约成本。本文采用单因素浸泡式方法对不锈钢板蚀刻进行了实验研究

研究了蚀刻时间、蚀刻液组分浓度及温度等因素对化学蚀刻质量的影响。结果表明

蚀刻液中FeCl3浓度、H3PO4浓度、温度等对蚀刻速度、蚀刻均匀性、侧蚀及粗糙度有较大的影响。研究结果对流体微细通道的制造提供了初步工艺参数。

Abstract

As a new type of modern manufacturing technologies

micro-fabrication technology comes into being with the emergence of micro-manufacturing

which realizes the machining and assembly in micro size. The chemical etching technology is one of the major processing methods for micro-fabrication technology

which includes immersing

bubbling

spraying and so on. Among them the equipment of immersion etching is simple

easy to operate and relatively low-cost. In this study

the influence of etching time

concentration of the etching liquid composition

etching temperature and other factors on the chemical etching is mainly studied by using single factor immersion method. The results show that FeCl3 concentration

H3PO4 concentration in the etching liquid

etching temperature and others heavily affected the etching rate

etching uniformity

lateral erosion and surface roughness. It provides elementary process parameters for the micro-manufacturing.

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