High-silica CHA zeolite membranes for CO2/C2H2 and N2/C2H2 separation

ZHOU Tao; YE Nannan; LUO Yu; MA Tiehao; PENG Xingyu; MA Jiaying; WANG Xuerui; GU Xuehong

doi:10.11949/0438-1157.20260524

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High-silica CHA zeolite membranes for CO₂/C₂H₂ and N₂/C₂H₂ separation

更新时间：2026-08-19

- High-silica CHA zeolite membranes for CO₂/C₂H₂ and N₂/C₂H₂ separation
- CIESC Journal (2026)
- 作者机构：
  
  1.南京工业大学化工学院，材料化学工程全国重点实验室，江苏南京 211800
  2.衢州膜材料创新研究院，浙江衢州 324000
- 作者简介：
- 基金信息：
- DOI：10.11949/0438-1157.20260524
  CLC： TQ 028.8
- Received：14 April 2026，
  
  Revised：2026-08-12，
  
  Accepted：19 August 2026，
- 稿件说明：
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ZHOU Tao, YE Nannan, LUO Yu, et al. High-silica CHA zeolite membranes for CO₂/C₂H₂ and N₂/C₂H₂ separation[J/OL]. CIESC Journal, 2026. DOI: 10.11949/0438-1157.20260524.
DOI：

ZHOU Tao, YE Nannan, LUO Yu, et al. High-silica CHA zeolite membranes for CO₂/C₂H₂ and N₂/C₂H₂ separation[J/OL]. CIESC Journal, 2026. DOI: 10.11949/0438-1157.20260524. DOI：

摘要

电子级乙炔（C

）是集成电路制造的关键碳源，通常由工业级乙炔提纯制得。膜分离技术具有能耗低、操作安全等优势，分子筛膜因其规整微孔结构和可调表面性质，可实现气体分子间的精准分离。研究表明，高硅CHA分子筛膜表现出优异的CO

与N

分离性能，0.3 MPa下CO

与N

分离选择性分别达到142和8.1。受孔口环境对气体分子扩散过程的影响，高硅CHA分子筛膜的气体渗透性呈CO

（3.3 Å）

（3.6 Å）

（3.3 Å）的顺序。高硅CHA分子筛膜可有效去除工业级乙炔中微量CO

与N

杂质，使两种杂质的含量分别降至0.06 ppm和11 ppm，满足电子级乙炔的纯度要求，在工业级乙炔深度提纯制备电子级乙炔的实际应用方面具有良好前景。

Abstract

Electronic-grade acetylene (C

) is a key carbon feedstock for integrated circuit fabrication and is typically obtained by purifying industrial-grade acetylene. Membrane separation offers advantages such as low energy consumption and operational safety. Zeolite membranes possess well-defined microporous structures and tunable surface properties

enabling precise molecular sieving separations. The high-silica CHA zeolite membrane exhibits excellent performance in CO

and N

separation

with selectivity of 142 and 8.1 at 0.3 MPa. The single gas permeance follows the order CO

(3.3 Å)

(3.6 Å)

(3.3 Å)

which is attributed to the pore opening property. The membrane can effectively remove trace CO

and N

impurities from industrial-grade acetylene

reducing the concentrations to 0.06 ppm and 11 ppm

meeting the purity requirements for electronic-grade acetylene and demonstrating strong potential for practical applications in deep purification.

关键词

Keywords

references

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