Preparation of Ultrafine Si_3N_4 Powders with Radio Frequency Plasma

朱清文; 阎嘉坪

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Preparation of Ultrafine Si_3N_4 Powders with Radio Frequency Plasma

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- Preparation of Ultrafine Si_3N_4 Powders with Radio Frequency Plasma
- CIESC Journal Issue 6, (1988)
- 作者机构：
  
  中国科学院力学研究所,中国科学院力学研究所 ,北京,北京
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Online First：25 December 1988，
  
  Published：25 December 1988
- 稿件说明：
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朱清文, 阎嘉坪. Preparation of Ultrafine Si_3N_4 Powders with Radio Frequency Plasma[J]. CIESC Journal, 1988, (6).
DOI：

朱清文, 阎嘉坪. Preparation of Ultrafine Si_3N_4 Powders with Radio Frequency Plasma[J]. CIESC Journal, 1988, (6). DOI：

摘要

本文研究了用高频等离子体合成Si_3N_4超细粉料.进行了合成系统的设计、参数选择

发展了利用“磁泵”效应把反应气体送入弧区和用氢气调整高频机——等离子体负载匹配的方法

分析了反应过程

作了数值计算

并制取了Si_3N_4超细粉料.

Abstract

Synthesis of ultrafine Si3N4 powders with radio frequency plasma was described. The design and the determination of the related parameters of the reaction system were discussed. "Magnetic pumping" was employed to introduce the reaction gases into the fireball of the plasma and H2 was used to regulate the oscillator-load matching. The reaction process was studied and the relevant data were computed for the preparation of ultrafine Si3N4 powder.

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