NUMERICAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION REACTORS (Ⅱ) ANALYSIS OF FLUID FLOW, HEAT AND MASS TRANSFER IN TWO-TYPE OF REACTORS

Ding Ping and Yuan Weikang(East China Institute of Chemical Technology; Shanghai 200237)

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NUMERICAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION REACTORS (Ⅱ) ANALYSIS OF FLUID FLOW, HEAT AND MASS TRANSFER IN TWO-TYPE OF REACTORS

更新时间：2025-12-16

- NUMERICAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION REACTORS (Ⅱ) ANALYSIS OF FLUID FLOW, HEAT AND MASS TRANSFER IN TWO-TYPE OF REACTORS
- CIESC Journal Issue 4, (1992)
- 作者机构：
  
  华东化工学院联合化学反应工程研究所,华东化工学院联合化学反应工程研究所上海200237,上海,200237
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Online First：25 August 1992，
  
  Published：25 August 1992
- 稿件说明：
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Ding Ping and Yuan Weikang(East China Institute of Chemical Technology, Shanghai 200237). NUMERICAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION REACTORS (Ⅱ) ANALYSIS OF FLUID FLOW, HEAT AND MASS TRANSFER IN TWO-TYPE OF REACTORS[J]. CIESC Journal, 1992, (4).
DOI：

Ding Ping and Yuan Weikang(East China Institute of Chemical Technology, Shanghai 200237). NUMERICAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION REACTORS (Ⅱ) ANALYSIS OF FLUID FLOW, HEAT AND MASS TRANSFER IN TWO-TYPE OF REACTORS[J]. CIESC Journal, 1992, (4). DOI：

摘要

分析了热壁化学气相淀积反应器在流型、温度和浓度分布以及淀积速率等方面与冷壁反应器的异同

探讨了流动特性、传递过程和反应器几何尺寸对淀积过程的影响

为淀积不同薄膜时反应器的选型及设计提供了方法和依据.

Abstract

According to computational results by Calerkin finite element method

comparisons are presented in terms of the distributions of velocity

temperature

TiCl4 concentration and the deposition rate of TiN in hot-wall reactors and cold-wall reactors. The effects of flow patterns

heat and mass transfer on coating qualities and deposition rate of TiN are analysed. The general results provide the guidelines for kinetic studies and the design of commercial CVD reactors.

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