Micro-bubble controlled growth in rectangular microchannel of micro-electro-mechanical systems

DONG Tao; YANG Zhaochu; BI Qincheng; ZHANG Yulong; GU Dandan; ZHANG Chunquan

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Micro-bubble controlled growth in rectangular microchannel of micro-electro-mechanical systems

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- Micro-bubble controlled growth in rectangular microchannel of micro-electro-mechanical systems
- CIESC Journal Issue 1, (2007)
- 作者机构：
  
  1. 厦门大学萨本栋微机电研究中心
  2. 北京理工大学爆炸科学与技术国家重点实验室
  3. 西安交通大学动力工程多相流国家重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Online First：05 January 2007，
  
  Published：05 January 2007
- 稿件说明：
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DONG Tao, YANG Zhaochu, BI Qincheng, et al. Micro-bubble controlled growth in rectangular microchannel of micro-electro-mechanical systems[J]. CIESC Journal, 2007, (1).
DOI：

DONG Tao, YANG Zhaochu, BI Qincheng, et al. Micro-bubble controlled growth in rectangular microchannel of micro-electro-mechanical systems[J]. CIESC Journal, 2007, (1). DOI：

摘要

采用微机电系统（MEMS）硅加工工艺，设计、加工出了6种不同规格的实验用微气泡控制生长MEMS器件；构建了MEMS器件中微气泡控制生长实验系统并完成了实验，讨论了热负荷、微加热元宽度、微通道截面参数、工质流速及物性参数等对微气泡生长的影响。结果表明：同等实验条件下，加热电压幅值越高，微气泡生长速率越快；加热脉冲宽度仅对微气泡形成后的进一步生长有影响；加热条件相同的前提下，微加热元宽度越大，气泡成核所需的时间越短、微气泡生长速率越快；微通道宽度一定且高宽比大于1的条件下，高宽比越小，后期微气泡生长速率越慢；微流体的流速越高，微气泡生长始点越晚、生长速率也越低。相同实验条件下，R113、FC-72、去离子水三者中，R113中微气泡生长始点最靠前、生长速率最快，去离子水中微气泡生长最靠后、生长速率最慢。

Abstract

With the silicon microfabrication process

six micro-electro-mechanical systems(MEMS) devices for exploring micro-bubble growth were designed and fabricated.Experimental investigations of micro-bubble growth in micro restrained space were performed.The results showed that the micro-bubble growth rate was influenced by heat power

dimensions of microheater

microchannel section

microfluidic velocity

and materials of the fluid.A higher heating voltage resulted in faster bubble growth.The width of heating pulse took effect during the latter period of bubble growth.Under the same heating voltage and pulse width

a larger width of the microheater led to faster bubble growth.When the aspect ratio of the microchannel section was over 1.0

a smaller aspect ratio brought on slower bubble growth during the latter period.The larger the microfluidic velocity

the later the bubble growth start point

and the slower the bubble growth.Under the same test condition

the bubble growth rate of R113 was the largest among the three working fluids

followed by FC-72 and deionized water

due to the effect of thermophysical parameters of the fluids.

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