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YANG Jiao,ZHANG Xinsheng
Online:
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杨娇,张新胜
Abstract:
The electronic tetrabutylammonium hydroxide (TBAH) using tetrabutyl amonium bromide(TBAB) as raw material was prepared.At first, the elimination of the metal ions in tetrabutyl amonium bromide (TBAB) solution by the cation exchange resins was systematically studied.The WU-64 cation exchange resin was the most efficient for the elimination of metal ions in tetrabutylamonium bromide solution among the four investigated resins.Then, the preparation of tetrabutylammonium hydroxide was carried out in an electrolyser with tri-chambers and sec-membranes, the current efficiency reached the maximum when the current density was 1000 A·m-2 and concentration of the raw material was 0.7 mol·L-1. Finally, the purification of the product was conducted in a divided cell separated by cation exchange membrane.The contents of Br- and Cl- residued in 15%(mass) TBAH solution after purification were 0.138 mg·kg-1 and 0.784 mg·kg-1 respectively.The results of the experiment can be references for microelectronics industry.
摘要:
讨论了以四丁基溴化铵为原料,离子膜电解法制备电子级四丁基氢氧化铵的条件。实验结果表明,在电解前金属离子的脱除中,WU-64树脂具有最好的提纯效果;在电解处理单元中,当电流密度为1000 A·m-2、原料浓度为0.7 mol·L-1时电流效率最高;在产品的后处理过程中,可采用两室一膜电解法对产品中阴离子进行去除,可得到溴含量为0.138 mg·kg-1、氯含量为0.784 mg·kg-1的质量分数为15%的四丁基氢氧化铵溶液。研究结果对于微电子工业有着重要的参考价值。
YANG Jiao,ZHANG Xinsheng. Preparation of electronic tetrabutylammonium hydroxide by ion-exchange membrane electrolysis[J]. .
杨娇,张新胜. 电子级四丁基氢氧化铵的离子膜电解法制备 [J]. CIESC Journal.
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https://hgxb.cip.com.cn/EN/Y2010/V61/IS1/77