CIESC Journal ›› 2018, Vol. 69 ›› Issue (7): 3159-3166.doi: 10.11949/j.issn.0438-1157.20171629
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FENG Liwei1,2, ZHANG Cheng1,2, LI Yuan2, XIE Yanhong1,2
CLC Number:
[1] WISE B M, GALLAGHER N B, BUTLER S W, et al. A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process[J]. Journal of Chemometrics, 1999, 13(3/4):379-396. |
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